Piezoresistive cantilever array for life sciences applications

被引：25

作者：

Polesel-Maris, J. ^{[1
]}

Aeschimann, L. ^{[2
]}

Meister, A. ^{[1
]}

Ischer, R. ^{[1
]}

Bernard, E. ^{[1
]}

Akiyama, T. ^{[2
]}

Giazzon, M. ^{[1
]}

Niedermann, P. ^{[1
]}

Staufer, U. ^{[2
]}

Pugin, R. ^{[1
]}

de Rooij, N. F. ^{[2
]}

Vettiger, P. ^{[1
,2
]}

Heinzelmann, H. ^{[1
]}

机构：

[1] Swiss Ctr Elect & Microtechnol CSEM SA, Rue Jaquet Droz 1, CH-2002 Neuchatel, Switzerland

[2] Univ Neuchatel, Inst Microtechnol, CH-2002 Neuchatel, Switzerland

来源：

PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY | 2007年 / 61卷

关键词：

D O I：

10.1088/1742-6596/61/1/189

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Atomic Force Microscopy (AFM) techniques are used with one- or two-dimensional arrays of piezoresistive probes for parallel imaging. We present a newly designed AFM platform to drive these passivated piezoresistive cantilever arrays in air and liquid environments. Large area imaging in liquid as well as qualitative and quantitative analysis of biological cells are demonstrated by the means of piezoresistive cantilever for the first time to our knowledge. Noise limitations in topography and force resolutions of these piezolevers are quantified.

引用

页码：955 / 959

页数：5

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