Piezoresistive cantilever array for life sciences applications

被引：25
|
作者：
Polesel-Maris, J. [1 ]
Aeschimann, L. [2 ]
Meister, A. [1 ]
Ischer, R. [1 ]
Bernard, E. [1 ]
Akiyama, T. [2 ]
Giazzon, M. [1 ]
Niedermann, P. [1 ]
Staufer, U. [2 ]
Pugin, R. [1 ]
de Rooij, N. F. [2 ]
Vettiger, P. [1 ,2 ]
Heinzelmann, H. [1 ]
机构：
[1] Swiss Ctr Elect & Microtechnol CSEM SA, Rue Jaquet Droz 1, CH-2002 Neuchatel, Switzerland
[2] Univ Neuchatel, Inst Microtechnol, CH-2002 Neuchatel, Switzerland
来源：
PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY | 2007年 / 61卷
关键词：
D O I：
10.1088/1742-6596/61/1/189
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Atomic Force Microscopy (AFM) techniques are used with one- or two-dimensional arrays of piezoresistive probes for parallel imaging. We present a newly designed AFM platform to drive these passivated piezoresistive cantilever arrays in air and liquid environments. Large area imaging in liquid as well as qualitative and quantitative analysis of biological cells are demonstrated by the means of piezoresistive cantilever for the first time to our knowledge. Noise limitations in topography and force resolutions of these piezolevers are quantified.
引用
收藏
页码：955 / 959
页数：5
相关论文
共 50 条
  • [1] Chemical sensors based on piezoresistive cantilever array
    Yu, XM
    Zhang, DC
    Wang, CS
    Du, XF
    Wang, XB
    Ruan, Y
    CHINESE PHYSICS LETTERS, 2003, 20 (09) : 1637 - 1640
  • [2] Piezoresistive Cantilever Array Sensor for Consolidated Bioprocess Monitoring
    Kim, Seonghwan
    Rahman, Touhidur
    Senesac, Larry R.
    Davison, Brian H.
    Thundat, Thomas
    SCANNING, 2009, 31 (05) : 204 - 210
  • [3] A VISCOMETER BASED ON VIBRATION OF DROPLETS ON A PIEZORESISTIVE CANTILEVER ARRAY
    Thanh-Vinh, Nguyen
    Matsumoto, Kiyoshi
    Shimoyama, Isao
    2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015, : 176 - 179
  • [4] Micro cantilever probe array integrated with Piezoresistive sensor
    Yang, ZX
    Li, XX
    Wang, YL
    Bao, HF
    Liu, M
    MICROELECTRONICS JOURNAL, 2004, 35 (05) : 479 - 483
  • [5] Tactile array sensor with piezoresistive cantilever embedded in air cavity
    Jain, Shweta
    Bhatia, Deepak
    2016 INTERNATIONAL CONFERENCE ON MICRO-ELECTRONICS AND TELECOMMUNICATION ENGINEERING (ICMETE), 2016, : 8 - 12
  • [6] MEASUREMENT OF SURFACE ACOUSTIC WAVES PROPAGATION USING A PIEZORESISTIVE CANTILEVER ARRAY
    Minh-Dung, Nguyen
    Quang-Khang, Pham
    Thanh-Vinh, Nguyen
    Matsumoto, Kiyoshi
    Shimoyama, Isao
    2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015, : 144 - 145
  • [7] Piezoresistive Probe Array for High Throughput Applications
    Gaitas, Angelo
    French, Paddy
    EUROSENSORS XXV, 2011, 25
  • [8] Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection
    Abedinov, N
    Grabiec, P
    Gotszalk, T
    Ivanov, T
    Voigt, J
    Rangelow, IW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2001, 19 (06): : 2884 - 2888
  • [9] Sensitivity characteristics of a waterproof airflow sensor based on a MEMS piezoresistive cantilever and nanohole array
    Hirayama, Takuto
    Kazoe, Yutaka
    Takahashi, Hidetoshi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2023, 62 (02)
  • [10] Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications
    Rangelow, I. W.
    Ivanov, Tzv.
    Ivanova, K.
    Volland, B. E.
    Grabiec, P.
    Sarov, Y.
    Persaud, A.
    Gotszalk, T.
    Zawierucha, P.
    Zielony, M.
    Dontzov, D.
    Schmidt, B.
    Zier, M.
    Nikolov, N.
    Kostic, I.
    Engl, W.
    Sulzbach, T.
    Mielczarski, J.
    Kolb, S.
    Latimier, Du P.
    Pedreau, R.
    Djakov, V.
    Huq, S. E.
    Edinger, K.
    Fortagne, O.
    Almansa, A.
    Blom, H. O.
    MICROELECTRONIC ENGINEERING, 2007, 84 (5-8) : 1260 - 1264
12345