A new micro sensor array with porous tin oxide thin films and micro-hotplate dangled by wires in air

被引：0

作者：

Lee, DS ^{[1
]}

Shim, CH ^{[1
]}

Lim, JW ^{[1
]}

Huh, JS ^{[1
]}

Lee, DD ^{[1
]}

机构：

[1] Elect & Telecommun Res Inst, Microsyst Team, Taejon 305600, South Korea

来源：

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年

关键词：

micro gas sensor; tin oxide; microhotplate;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

A micro sensor array with the highly sensitive porous tin oxide thin films employing the noble metal catalysts of Pt and An on a new micro-hotplate, dangled in air by Pt bonding wires, has been designed and fabricated. The micro hot plate was made of N/O/N Si diaphragm with area of 1.9x2.1 mm(2). The power consumption was reduced by decreasing the thickness of substrate. The sensor array was applied to recognizing the explosive gases within the range of threshold limit values (TLVs), employing principal component analysis. The result showed that the micro sensor array was qualified for classifying obviously the kinds and quantities of the explosive gases.

引用

页码：1704 / 1707

页数：4

共 7 条

[1]

BALTES H, 1996, SENSORS UPDATE, V2, P140

[2] FAST TEMPERATURE-PROGRAMMED SENSING FOR MICRO-HOTPLATE GAS SENSORS [J].

CAVICCHI, RE ;

SUEHLE, JS ;

KREIDER, KG ;

GAITAN, M ;

CHAPARALA, P .

IEEE ELECTRON DEVICE LETTERS, 1995, 16 (06) :286-288

[3]

GARDNER JW, 1994, MICROSENSORS PRINCIP

[4] GAS-SENSING CHARACTERISTICS OF SNO2-X THIN-FILM WITH ADDED PT FABRICATED BY THE DIPPING METHOD [J].

LEE, DD ;

CHUNG, WY .

SENSORS AND ACTUATORS, 1989, 20 (03) :301-305

[5]

SEIYAMA T, 1972, DENKI KAGAKU, V40, P244

[6]

SOLZBACHER F, 1999, TRANSDUCERS 99, P1032

[7]

TAJIMA M, 1999, TRANSDUCERS 99, P1016

← 1 →