Structural and Optical Properties of RF - Sputtered ZnS Thin Films

被引:2
作者
Kedawat, Garima [1 ]
Srivastava, Subodh [1 ]
Sharma, Sarla [1 ]
Vijay, Y. K. [1 ]
机构
[1] Univ Rajasthan, Dept Phys, Jaipur 302004, Rajasthan, India
来源
OPTICS: PHENOMENA, MATERIALS, DEVICES, AND CHARACTERIZATION: OPTICS 2011: INTERNATIONAL CONFERENCE ON LIGHT | 2011年 / 1391卷
关键词
Thin film; Thickness; X Ray Diffraction; Optical properties; Optical micrograph; ZINC-SULFIDE; SPRAY-PYROLYSIS; GROWTH;
D O I
10.1063/1.3646786
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Zinc sulfide (ZnS) thin films were deposited on glass substrates by radio - frequency (RF) magnetron sputtering technique at pressure of 10(-6) torr. The deposition parameters were optimized and the films were annealed in air atmosphere (300 degrees C for 1hr). The obtained (as-deposited and annealed) thin films were characterized for structural and optical properties. The thickness of the films was calculated by ellipsometry. XRD patterns revealed that the films were crystalline in nature with hexagonal structure. The morphological characteristic was carried out by optical microscopy. The optical absorption studies in the wavelength range 300-900 nm show that energy band gap of the film was found to be decreased with the annealing temperature.
引用
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页数:3
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