Broadband on-chip contact pad to microstrip transition with low loss in SiGe BiCMOS technology

被引:0
作者
von Vangerow, C. [1 ]
Goettel, B. [1 ]
Mueller, D. [1 ]
Zwick, T. [1 ]
机构
[1] Karlsruhe Inst Technol, Inst Radio Frequency Engn & Elect, Karlsruhe, Germany
关键词
BiCMOS integrated circuits; Ge-Si alloys; microstrip transitions; coplanar waveguides; bipolar MIMIC; field effect MIMIC; semiconductor materials; integrated circuit testing; electrical field; ground pads; substrate shield; lossy silicon substrate; electromagnetic field simulations; high-frequency measurement probe; field distribution; realistic excitation source; fabricated test structure; insertion loss; silicon based technologies; coplanar waveguide structure; broadband properties; BiCMOS technology; broadband compact on-chip contact pad; back-to-back configuration; millimetre-wave applications; microstrip transition; SiGe; Si; DESIGN;
D O I
10.1049/el.2018.5667
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A broadband, compact on-chip contact pad to microstrip transition for use in silicon (Si) based technologies operating up to 330 GHz has been investigated and fabricated. The pad is designed as a short coplanar waveguide structure to concentrate the electrical field in the narrow gap between signal and ground pads, thus eliminating the need for a substrate shield while preserving low interaction with the lossy silicon substrate. The working principle is confirmed by electromagnetic field simulations using a detailed model of a high-frequency measurement probe, which allows to investigate the field distribution with a realistic excitation source. The fabricated test structure with two transitions in a back-to-back configuration shows excellent broadband properties and insertion loss below 4.2 dB up to 330 GHz, making the proposed structure well suited for millimetre-wave applications.
引用
收藏
页码:1338 / 1339
页数:2
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