Ellipsometry for measurement of complex dielectric permittivity in millimeter-wave region

被引:2
|
作者
Tsuzukiyama, K [1 ]
Sakai, T [1 ]
Yamazaki, T [1 ]
Hashimoto, O [1 ]
机构
[1] Mitsui Chem INC, Sodegaura, Chiba 2990265, Japan
关键词
D O I
10.1109/EUMA.2003.340996
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The ellipsometry method is extended to a measurement for complex permittivities of materials in millimeter-wave region. We propose an effective technique based on the Fourier analysis method to eliminate an uncertainty due to the free-space method. Complex permittivities can be measured with a high degree of accuracy by the improved ellipsometry method, as named Fourier Analysis Correction Ellipsometry (FACE) Method.
引用
收藏
页码:487 / 490
页数:4
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