High-resolution microcalorimeter energy-dispersive spectrometer for x-ray microanalysis and particle analysis

被引：0

作者：

Wollman, DA ^{[1
]}

Hilton, GC ^{[1
]}

Irwin, KD ^{[1
]}

Dulcie, LL ^{[1
]}

Bergren, NF ^{[1
]}

Newbury, DE ^{[1
]}

Woo, KS ^{[1
]}

Liu, BYH ^{[1
]}

Diebold, AC ^{[1
]}

Martinis, JM ^{[1
]}

机构：

[1] Natl Inst Stand & Technol, Boulder, CO 80303 USA

来源：

CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY | 1998年 / 449卷

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have developed a high-resolution microcalorimeter energy-dispersive spectrometer (EDS) at NIST that provides improved x-ray microanalysis of contaminant particles and defects important to the semiconductor industry. Using our microcalorimeter EDS mounted on a scanning electron microscope (SEM), we have analyzed a variety of specific sized particles on Si wafers, including 0.3 mu m diameter W particles and 0.1 mu m diameter Al2O3 particles. To compare the particle analysis capabilities of microcalorimeter EDS to that of semiconductor EDS and Auger electron spectroscopy (AES), we report measurements of the Al-K alpha/Si-K alpha x-ray peak intensity ratio for 0.3 mu m diameter Al2O3 particles on Si as a function of electron beam energy. We also demonstrate the capability of microcalorimeter EDS for chemical shift measurements.

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页码：799 / 804

页数：6

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