High-resolution microcalorimeter energy-dispersive spectrometer for x-ray microanalysis and particle analysis

We have developed a high-resolution microcalorimeter energy-dispersive spectrometer (EDS) at NIST that provides improved x-ray microanalysis of contaminant particles and defects important to the semiconductor industry. Using our microcalorimeter EDS mounted on a scanning electron microscope (SEM), we have analyzed a variety of specific sized particles on Si wafers, including 0.3 mu m diameter W particles and 0.1 mu m diameter Al2O3 particles. To compare the particle analysis capabilities of microcalorimeter EDS to that of semiconductor EDS and Auger electron spectroscopy (AES), we report measurements of the Al-K alpha/Si-K alpha x-ray peak intensity ratio for 0.3 mu m diameter Al2O3 particles on Si as a function of electron beam energy. We also demonstrate the capability of microcalorimeter EDS for chemical shift measurements.