Study the effect of silver ion implantation on the structural, optical, and electrical properties of copper oxide thin films: an experimental and theoretical approach

Copper oxide thin films were deposited by using pulsed DC magnetron sputtering system on glass substrates for various powers. The X-ray diffraction, optical spectroscopy, and SEM were used to characterize the physical and optical properties of films. Sputtered copper oxide films showed Cu2O and CuO phases. Copper oxide films deposited at 90 W were implanted with silver ions, which is one of the interesting methods to tune the electrical and optical properties of metal oxides. The optical and electrical properties of the films were also studied after ion implantation. The band gap, refractive index, and resistivity were found to be decreased after silver ion implantation. Furthermore, the influence of the silver (Ag) ion implantation on the optical properties of CuO and Cu2O was calculated using the density functional theory, with CASTEP code, which is complying with experimental trend. This study has revealed on the basis of the physical characteristics that CuO and Cu2O can be used as a suitable absorbent material in solar cells.