A Novel PET-Based Piezoresistive MEMS Sensor Platform for Agricultural Applications

被引：11

作者：

Patkar, Rajul S. ^{[1
]}

Vinchurkar, Madhuri ^{[1
]}

Ashwin, Mamta ^{[1
]}

Rao, V. Ramgopal ^{[1
]}

机构：

[1] Indian Inst Technol, Dept Elect Engn, Bombay 400076, Maharashtra, India

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2017年 / 26卷 / 04期

关键词：

Microelectromechanical systems (MEMS); piezoresistive; graphene nano platelets (GNP); cantilever; polyethylene terephthalate (PET); macronutrients;

D O I：

10.1109/JMEMS.2017.2710264

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A simple and cost effective process is demonstrated for fabricating polyethylene terephthalate (PET) cantilever-based sensor platform with piezoresistive transduction. A one step method is developed to coat graphene nanoplatelet piezoresistive layer on to the PET structural layer. The proposed platform can be used for a variety of sensing applications. The novelty of this process is that it does not require any expensive lithography tools or a specialized clean room facility. We report here the fabrication, characterization, and application of this sensor for the detection of soil macronutrients. Ours is the first report demonstrating the use of PET-based microelectromechanical system for agricultural sensing application.

引用

页码：746 / 748

页数：3

共 11 条

[1] Piezoresistive Behavior of Graphene Nanoplatelets/Carbon Black/Silicone Rubber Nanocomposite [J].

Cai, Wenting ;

Huang, Ying ;

Wang, Dayue ;

Liu, Caixia ;

Zhang, Yugang .

JOURNAL OF APPLIED POLYMER SCIENCE, 2014, 131 (03)

[2]

Hosseinzadegan H., 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), P611, DOI 10.1109/MEMSYS.2012.6170262

[3] Soil macronutrient sensing for precision agriculture [J].

Kim, Hak-Jin ;

Sudduth, Kenneth A. ;

Hummel, John W. .

JOURNAL OF ENVIRONMENTAL MONITORING, 2009, 11 (10) :1810-1824

[4] AN IMPROVED TECHNIQUE FOR DETERMINING HARDNESS AND ELASTIC-MODULUS USING LOAD AND DISPLACEMENT SENSING INDENTATION EXPERIMENTS [J].

OLIVER, WC ;

PHARR, GM .

JOURNAL OF MATERIALS RESEARCH, 1992, 7 (06) :1564-1583

[5]

Patkar R. S., 2016, P IEEE INEC MAY, P1

[6]

Patkar RS, 2015, 2015 IEEE 15TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), P751, DOI 10.1109/NANO.2015.7388717

[7]

Swofford H. W., 1990, U.S. Patent, Patent No. [4 954 396 A, 4954396]

[8]

Thaysen J., 2001, THESIS

[9] Advanced thermo-mechanical characterization of organic materials by piezoresistive organic resonators [J].

Thuau, D. ;

Ayela, C. ;

Lemaire, E. ;

Heinrich, S. ;

Poulin, P. ;

Dufour, I. .

MATERIALS HORIZONS, 2015, 2 (01) :106-112

[10]

Thundat T. G., 2000, U.S. Patent, Patent No. [6016686A, 6016686]

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