Optical and morphological properties of the CdO thin films as a function of film thickness

被引:2
作者
Sakar, Betul Ceviz [1 ]
Saritas, Sevda [2 ]
Kundakci, Mutlu [3 ]
机构
[1] East Anatolia High Technol Applicat & Res Ctr, Erzurum, Turkey
[2] Ispir Hamza Polat Vocat Coll, Erzurum, Turkey
[3] Ataturk Univ, Sci Fac, Dept Phys, Erzurum, Turkey
关键词
DC sputtering; CdO; Thickness; Thin film; SEM; CADMIUM-OXIDE;
D O I
10.1016/j.matpr.2021.01.552
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
It has been investigated the effect of film thickness on the optical and morphological properties of cadmium oxide (CdO) thin film. For this reason, transparent and conducting CdO thin films were deposited on glass substrates at 200 degrees C temperature using DC magnetron sputtering method. The power of the sputter in the experiment was set up to 100 W. In order to determine the morphological properties of the films, X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM) was used. Also optical band gap of the films was determined by using UV-VIS spectroscopy. The XRD results showed that the films were in polycrystalline cubic structure. It was concluding that the surface roughness values decrease with the increasing film thickness. The changes of optical band gap of the CdO thin films was stable for the thickness of 100 nm and 150 nm but the band gap value increase about 0.3 eV with the film thickness of 200 nm. (c) 2021 Elsevier Ltd. Selection and peer-review under responsibility of the scientific committee of the International Congress on Semiconductor Materials and Devices, ICSMD2018.
引用
收藏
页码:6892 / 6894
页数:3
相关论文
共 16 条
[1]   Structural, optical and electrical properties of chemically sprayed CdO thin films [J].
Bhosale, CH ;
Kambale, AV ;
Kokate, AV ;
Rajpure, KY .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2005, 122 (01) :67-71
[2]   Chemically deposited cubic structured CdO thin films: Use in liquefied petroleum gas sensor [J].
Bulakhe, R. N. ;
Lokhande, C. D. .
SENSORS AND ACTUATORS B-CHEMICAL, 2014, 200 :245-250
[3]   High transmittance CdO thin films obtained by the sol-gel method [J].
Carballeda-Galicia, DM ;
Castanedo-Pérez, R ;
Jiménez-Sandoval, O ;
Jiménez-Sandoval, S ;
Torres-Delgado, G ;
Zúñiga-Romero, CI .
THIN SOLID FILMS, 2000, 371 (1-2) :105-108
[4]   DEGENERATE CADMIUM-OXIDE FILMS FOR ELECTRONIC DEVICES [J].
CHU, TL ;
CHU, SS .
JOURNAL OF ELECTRONIC MATERIALS, 1990, 19 (09) :1003-1005
[5]   LATTICE PARAMETER AND DEFECT STRUCTURE OF CADMIUM OXIDE CONTAINING FOREIGN ATOMS [J].
CIMINO, A ;
MAREZIO, M .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1960, 17 (1-2) :57-64
[6]  
Cullity B. D., 1957, Phys. Today, V10
[7]   Large photoresponse of CdO/porous Si diodes [J].
Dhar, S ;
Chakrabarti, S .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2000, 15 (11) :L39-L40
[8]  
Ferro R, 2000, PHYS STATUS SOLIDI A, V177, P477, DOI 10.1002/(SICI)1521-396X(200002)177:2<477::AID-PSSA477>3.0.CO
[9]  
2-3
[10]   DISORDER AND OXYGEN TRANSPORT IN CADMIUM OXIDE [J].
HAUL, R ;
JUST, D .
JOURNAL OF APPLIED PHYSICS, 1962, 33 (01) :487-&