[1] Delft Univ Technol, Dept Precis Microsyst Engn, Mekelweg 2, NL-2628 CD Delft, Netherlands
[2] McGill Univ, Dept Mech Engn, 817 Sherbrooke St West, Montreal, PQ H3A 0C3, Canada
[3] Univ Parma, Dept Ind Engn, Parco Area Sci 181-A, I-43100 Parma, Italy
[4] Univ Parma, Dept Ind Engn, Ctr Excellence Res & Innovat Technol, INAIL Res Certificat & Verificat Area, Via Usberti 181-A, I-43124 Parma, Italy