Room temperature fabrication of ZnO/ST-cut quartz SAW UV photodetector with small temperature coefficient

被引：15
作者：
Tsai, Wen-Che [1 ]
Kao, Hui-ling [1 ]
Liao, Kun-Hsu [1 ]
Liu, Yu-Hao [1 ]
Lin, Tzu-Ping [1 ]
Jeng, Erik S. [1 ]
机构：
[1] Chung Yuan Christian Univ, Dept Elect Engn, Chungli 32023, Taiwan
来源：
OPTICS EXPRESS | 2015年 / 23卷 / 03期
关键词：
WAVE; FILTER; FILM;
D O I：
10.1364/OE.23.002187
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Room-temperature fabricated ZnO/ST-cut quartz is adopted for SAW ultraviolet (UV) photodetector. The ST-cut quartz substrate and ZnO layer are used for SAW excitation and photodetection, respectively. High resolution x-ray diffraction (XRD) and photoluminescence (PL) measurement indicate that high quality ZnO films can be deposited on ST-cut quartz using radio frequency (RF) sputtering. As the SAW devices under UV illumination (6 mW/cm(2)), a downshift in frequency of about 35 KHz can be observed. The observed small temperature coefficient of frequency (TCF) indicates that SAW devices exhibit good temperature stability. The results present feasibility of using ZnO/ST-cut quartz SAW photodetectors in ultraviolet region. (C) 2015 Optical Society of America
引用
收藏
页码：2187 / 2195
页数：9
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