IRRADIATING LOW-TEMPERATURE ATMOSPHERIC PRESSURE PLASMA TO CELLS USING MEMS NOZZLE

被引:0
作者
Nakayama, Y. [1 ]
Shimane, R. [1 ]
Kumagai, S. [1 ]
Hashizume, H. [2 ]
Ohta, T. [3 ]
Ito, M. [3 ]
Hori, M. [2 ]
Sasaki, M. [1 ]
机构
[1] Toyota Technol Inst, Nagoya, Aichi, Japan
[2] Nagoya Univ, Nagoya, Aichi, Japan
[3] Meijo Univ, Nagoya, Aichi, Japan
来源
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年
关键词
Atmospheric pressure plasma; plasma treatment; cells;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A MEMS nozzle device achieved low-temperature atmospheric pressure plasma irradiation for individual treatment of cells. The MEMS nozzle device had cell-trapping and releasing function, which enabled stable plasma treatment. Cells were trapped at the nozzle holes and the nozzle holes defined the area of plasma irradiation. Plasma treatment was performed against polyethylene bead (phi 30 mu m), lily pollen (length: 100-140 mu m) and narcissus pollen (length: 20-60 mu m). Surface area of phi 10-20 mu m was locally etched. By improving the configuration of plasma generation, nozzle temperature during the plasma irradiation was decreased to 40 degrees C, which was almost the same as human body.
引用
收藏
页码:1641 / 1644
页数:4
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