A MEMS-Based Electrochemical Angular Accelerometer With a Force-Balanced Negative Feedback

被引：14

作者：

Liang, Tian ^{[1
,2
]}

Wang, Junbo ^{[1
,2
]}

Chen, Deyong ^{[1
,2
]}

Liu, Bowen ^{[1
,2
]}

She, Xu ^{[1
,2
]}

Xu, Chao ^{[1
,2
]}

Qi, Wenjie ^{[1
,2
]}

Agafonov, Vadim ^{[3
]}

Egorov, Egor ^{[3
]}

Chen, Jian ^{[1
,2
]}

机构：

[1] Chinese Acad Sci, Aerosp Informat Res Inst, State Key Lab Transducer Technol, Beijing 100190, Peoples R China

[2] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing 100049, Peoples R China

[3] Moscow Inst Phys & Technol, Ctr Mol Elect, Dolgoprudnyi 141701, Russia

来源：

IEEE SENSORS JOURNAL | 2021年 / 21卷 / 14期

基金：

俄罗斯科学基金会; 中国国家自然科学基金;

关键词：

Microelectromechanical system; electrochemical angular accelerometer; rotational sensor; interdigitation microelectrode; negative feedback; microfabrication;

D O I：

10.1109/JSEN.2021.3075748

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a MEMS based electrochemical angular accelerometer with feedback where the relative movement between the liquid inertial mass and the sensitive microelectrodeswas counter balanced by the feedback force. Theoretical analysis was conducted to model the response of the angular accelerometer with feedback. Both sensitive and feedback electrodes were made based on microfabrication and assembled to form MEMS based electrochemical angular accelerometer with feedback. Device characterization was conducted, locating a sensitivity of 8 V/(rad/s(2)), a bandwidth of 0.0083-8 Hz and a noise level of 6.31 x 10(-7) (rad/s(2))/root Hz. In comparison to previously reported MEMS based electrochemical angular accelerometer without feedback, a significant improvement at low frequencies in 3dB bandwidth (0.0083-8 Hz vs. 0.02-10 Hz) was achieved due to the inclusion of the feedback part. This study can provide a new perspective for the development of electrochemical angular accelerometer, which may be further used in seismic monitoring.

引用

页码：15972 / 15978

页数：7

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