Evolution of the mechanical and tribological properties of DLC thin films doped with low-concentration hafnium on 316L steel

被引:7
作者
Qi, Meng [1 ]
Xiao, Jianrong [1 ]
Gong, Chenyang [1 ]
Jiang, Aihua [1 ]
Chen, Yong [1 ]
机构
[1] Guilin Univ Technol, Coll Sci, Guilin 541004, Peoples R China
基金
中国国家自然科学基金;
关键词
diamond-like thin film; process parameters; hafnium doping; mechanical property; tribological property; TRIBOCORROSION PERFORMANCE; ELASTIC-MODULUS; CARBON-FILMS; MICROSTRUCTURE; CORROSION; COATINGS; TITANIUM; BEHAVIOR; HARDNESS; HFC;
D O I
10.1088/1361-6463/aa9c2d
中图分类号
O59 [应用物理学];
学科分类号
摘要
Low concentrations (< 1 at%) of hafnium doped into diamond-like thin films (Hf-DLC) were deposited on 316L stainless steel and silicon (1 0 0) substrates by magnetron sputtering to attain superior mechanical and tribological properties. Ar and CH4 were used as source gases. The microstructure, chemical composition, and morphology of the Hf-DLC thin films in various concentrations were analyzed using x-ray diffraction, Raman spectroscopy, x-ray photoelectron spectroscopy, scanning electron microscopy and atomic force microscopy. Results showed that Hf species transferred from the particulate microstructure to Hf carbide phases, and the surface roughness increased monotonically with increasing Hf concentration. Moreover, the hardness and elastic modulus exhibited high values when the doped Hf concentration was 0.42 at%. Similarly, the tribological behaviors and wear life of Hf-DLC thin films had a low friction coefficient and excellent wear resistance at 0.42 at% Hf concentration. Therefore, 0.42 at% Hf is an optimal doping concentration to improve the mechanical and tribological properties of DLC thin films. Generally, the use of low-concentration Hf doping into DLC thin films is novel, and the present results provide guidance for the selection of suitable and effective concentration to optimize Hf-DLC thin films with superior performance.
引用
收藏
页数:10
相关论文
共 58 条
[11]   Tribological properties, corrosion resistance and biocompatibility of magnetron sputtered titanium-amorphous carbon coatings [J].
Dhandapani, Vishnu Shankar ;
Subbiah, Ramesh ;
Thangavel, Elangovan ;
Arumugam, Madhankumar ;
Park, Kwideok ;
Gasem, Zuhair M. ;
Veeraragavan, Veeravazhuthi ;
Kim, Dae-Eun .
APPLIED SURFACE SCIENCE, 2016, 371 :262-274
[12]   Tribology of diamond-like carbon films: recent progress and future prospects [J].
Erdemir, Ali ;
Donnet, Christophe .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2006, 39 (18) :R311-R327
[13]   Interpretation of Raman spectra of disordered and amorphous carbon [J].
Ferrari, AC ;
Robertson, J .
PHYSICAL REVIEW B, 2000, 61 (20) :14095-14107
[14]   Pulsed laser deposited hard TiC, ZrC, HfC and TaC films on titanium: Hardness and an energy-dispersive X-ray diffraction study [J].
Ferro, D. ;
Rau, J. V. ;
Albertini, V. Rossi ;
Generosi, A. ;
Teghil, R. ;
Barinov, S. M. .
SURFACE & COATINGS TECHNOLOGY, 2008, 202 (08) :1455-1461
[15]   Design and synthesis of diffusion-modified HfC/HfCeSiC bilayer system onto WC-Co substrate for adherent diamond deposition [J].
Gao, Jie ;
Hei, Hongjun ;
Zheng, Ke ;
Wang, Rong ;
Shen, Yanyan ;
Liu, Xiaoping ;
Tang, Bin ;
He, Zhiyong ;
Yu, Shengwang .
JOURNAL OF ALLOYS AND COMPOUNDS, 2017, 705 :376-383
[16]   Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating [J].
Gao, Kaixiong ;
Zhang, Lifang ;
Wang, Jian ;
Zhang, Bin ;
Zhang, Junyan .
APPLIED SURFACE SCIENCE, 2015, 353 :522-529
[17]   Microstructure and mechanical properties of Ti/Al co-doped DLC films: Dependence on sputtering current, source gas, and substrate bias [J].
Guo, Ting ;
Kong, Cuicui ;
Li, Xiaowei ;
Guo, Peng ;
Wang, Zhenyu ;
Wang, Aiying .
APPLIED SURFACE SCIENCE, 2017, 410 :51-59
[18]   Optimisation of diamond-like carbon films by unbalanced magnetron sputtering for infrared transmission enhancement [J].
Hang, Lingxia ;
Yin, Y. ;
Xu, Junqi .
THIN SOLID FILMS, 2006, 515 (01) :357-361
[19]   Antibacterial efficacy of titanium-containing alloy with silver-nanoparticles enriched diamond-like carbon coatings [J].
Harrasser, Norbert ;
Juessen, Sebastian ;
Banke, Ingo J. ;
Kmeth, Ralf ;
von Eisenhart-Rothe, Ruediger ;
Stritzker, Bernd ;
Gollwitzer, Hans ;
Burgkart, Rainer .
AMB EXPRESS, 2015, 5 :1-11
[20]   Optimisation of tribological performance of sputtering Zr/ZrC coatings [J].
Jean, M. -D. .
SURFACE ENGINEERING, 2015, 31 (02) :103-113