Preparation of sputtered (Bax,Sr1-x)TiO3 thin films directly on copper

被引：29
|
作者：
Laughlin, B [1 ]
Ihlefeld, J [1 ]
Maria, JP [1 ]
机构：
[1] N Carolina State Univ, Dept Mat Sci & Engn, Electroceram Thin Films Grp, Raleigh, NC 27695 USA
来源：
JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 2005年 / 88卷 / 09期
关键词：
D O I：
10.1111/j.1551-2916.2005.00488.x
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
(Ba-0.6,Sr-0.4)TiO3 (BST) films were deposited on copper foils by radio frequency magnetron sputtering. By the use of controlled pO(2) high-temperature anneals, the films were completely crystallized in the absence of substrate oxidation. X-ray diffraction and transmission electron microscopy (TEM) revealed an abrupt Cu/BST interface. The deposited BST films exhibit a zero bias permittivity and loss tangent values of 600 and 0.018, respectively. An electrical tunability ratio of 3.5:1 is observed on these metal-insulator-metal devices. Devices show leakage currents of 10(-8) A/cm(2) at +/- 10 V/mu m, and loss tangents as low as 0.003 in fields approaching 40 V/mu m.
引用
收藏
页码：2652 / 2654
页数：3
相关论文
共 50 条
  • [1] Preparation and properties of (Bax,Sr1-x)TiO3 thin film for high density DRAM application
    Xie, YH
    Lin, YY
    Tang, TA
    SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 722 - 725
  • [2] Surface morphology analysis of nanostructured (Bax, Sr1-x)TiO3 thin films using fractal method
    Hong, K.-J., 1962, Japan Society of Applied Physics (42):
  • [3] Surface morphology analysis of nanostructured (Bax,Sr1-x)TiO3 thin films using fractal method
    Hong, K
    Min, YK
    Cho, WK
    Cho, JC
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (4B): : 1962 - 1965
  • [4] Room temperature multiferroic properties of (Fex, Sr1-x)TiO3 thin films
    Kim, Kyoung-Tae
    Kim, Cheolbok
    Fang, Sheng-Po
    Yoon, Yong-Kyu
    APPLIED PHYSICS LETTERS, 2014, 105 (10)
  • [5] Significant suppression of leakage current in (Bax,Sr1-x)TiO3/MgO heterostructured thin films by thin MgO layers insertion
    Jianfeng Jia
    Kai Huang
    Qingtao Pan
    Deyan He
    Journal of Sol-Gel Science and Technology, 2007, 42 : 9 - 12
  • [6] Effect of mechanical loading on the tuning of acoustic resonances in Ba x Sr1-x TiO3 thin films
    Noeth, A.
    Yamada, T.
    Tagantsev, A. K.
    Setter, N.
    JOURNAL OF ELECTROCERAMICS, 2010, 24 (03) : 237 - 244
  • [7] The Influence of the Substrate Material on the Structure and Electrophysical Properties of Ba x Sr1-x TiO3 Thin Films
    Afanasiev, M. S.
    Kiselev, D. A.
    Levashov, S. A.
    Luzanov, V. A.
    Nabiyev, A. A.
    Naryshkina, V. G.
    Sivov, A. A.
    Chucheva, G. V.
    PHYSICS OF THE SOLID STATE, 2018, 60 (05) : 954 - 957
  • [8] Significant suppression of leakage current in (Ba x,Sr1-x)TiO3/MgO heterostructured thin films by thin MgO layers insertion
    Jia, Jianfeng
    Huang, Kai
    Pan, Qingtao
    He, Deyan
    JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2007, 42 (01) : 9 - 12
  • [9] Thermoelectric properties of the ceramic oxide Sr1-x La x TiO3
    Mahmud, Iqbal
    Yoon, Man-Soon
    Kim, Il-Ho
    Choi, Moon-Kwan
    Ur, Soon-Chul
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2016, 68 (01) : 35 - 40
  • [10] Structural and optical properties of Bax Sr1-x TiO3 thin films on indium tin oxide/quartz substrates prepared by radio-frequency magnetron sputtering
    Leng, W.J.
    Yang, C.R.
    Zhang, J.H.
    Chen, H.W.
    Ji, H.
    Fu, C.L.
    Liao, J.X.
    Journal of Applied Physics, 2006, 99 (11):
12345