Peculiarities of latent track etching in SiO2/Si structures irradiated with Ar, Kr and Xe ions

被引：12

作者：

Al'zhanova, A. ^{[1
]}

Dauletbekova, A. ^{[1
]}

Komarov, F. ^{[2
]}

Vlasukova, L. ^{[2
]}

Yuvchenko, V. ^{[2
]}

Akilbekov, A. ^{[1
]}

Zdorovets, M. ^{[3
]}

机构：

[1] LN Gumilyov Eurasian Natl Univ, 2 Satpayev Str, Astana 010008, Kazakhstan

[2] Belarusian State Univ, 4 Nezavisimosti Ave, Minsk 220030, BELARUS

[3] Inst Nucl Phys, Astana Branch, 2-1 Abylaikhan Ave, Astana 010008, Kazakhstan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2016年 / 374卷

关键词：

Amorphous SiO2 layer; Ion tracks; Chemical etching; Channel system;

D O I：

10.1016/j.nimb.2015.08.046

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The process of latent track etching in SiO2/Si structures irradiated with Ar-40 (38 MeV), Kr-84 (59 MeV) and Xe-132 (133 and 200 MeV) ions has been investigated. The experimental results of SiO2 etching in a hydrofluoric acid solution have been compared with the results of computer simulation based on the thermal spike model. It has been confirmed that the formation of a molten region along the swift ion trajectory with minimum radius of 3 nm can serve as a theoretical criterion for the reproducible latent track etching tracks in SiO2. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：121 / 124

页数：4

共 15 条

[1]

[Anonymous], 1994, GMELIN HDB INORG S B, VB5, P264

[2] Ion track formation in low temperature silicon dioxide [J].

Bergamini, F. ;

Bianconi, M. ;

Cristiani, S. ;

Gallerani, L. ;

Nubile, A. ;

Petrini, S. ;

Sugliani, S. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2008, 266 (10) :2475-2478

[3] Nanoporous SiO2/Si thin layers produced by ion track etching:: Dependence on the ion energy and criterion for etchability [J].

Dallanora, A. ;

Marcondes, T. L. ;

Bermudez, G. G. ;

Fichtner, P. F. P. ;

Trautmann, C. ;

Toulemonde, M. ;

Papaleo, R. M. .

JOURNAL OF APPLIED PHYSICS, 2008, 104 (02)

[4]

Ferting N., 2002, J BIOPHYS, V18, P3056

[5]

Fleischer R. L., 1975, NUCL TRACKS SOLIDS, P23

[6] Silica-based monolithic sensing plates for waveguide-mode sensors [J].

Fujimaki, Makoto ;

Rockstuhl, Carsten ;

Wang, Xiaomin ;

Awazu, Koichi ;

Tominaga, Junji ;

Koganezawa, Yuuki ;

Ohki, Yoshimichi ;

Komatsubara, Tetsuro .

OPTICS EXPRESS, 2008, 16 (09) :6408-6416

[7] An ion track based approach to nano- and micro-electronics [J].

Hoppe, K. ;

Fahrner, W. R. ;

Fink, D. ;

Dhamodoran, S. ;

Petrov, A. ;

Chandra, A. ;

Saad, A. ;

Faupel, F. ;

Chakravadhanula, V. S. K. ;

Zaporotchenko, V. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2008, 266 (08) :1642-1646

[8]

Jensen J., 2000, NUCL INSTRUM METH B, V166, P903

[9]

Sigrist A., 1997, HELV PHYS ACTA, V50, P75

[10] Guided transmission of 3-keV Ne7+ ions through nanocapillaries in insulating polymers: Dependence on the capillary diameter [J].

Stolterfoht, N. ;

Hellhammer, R. ;

Juhasz, Z. ;

Sulik, B. ;

Bodewits, E. ;

Dang, H. M. ;

Hoekstra, R. .

PHYSICAL REVIEW A, 2010, 82 (05)

← 1 2 →