Influence of helium implantation of optical fibre faceplates on acid etching

In order to achieve preferential etching of a structured multi-component glass fibreoptic faceplate the surface has been ion implanted to enhance the differences in chemical reactivity of the various glass constituents. While HF dissolution is enhanced at silicate glass components due to ion beam electronic excitation, changes in the glass stability of the heavy metal fibre core due to nuclear collision damage were evident at the end of the ion penetration range after HNO3 acid attack. (C) 2003 Elsevier Ltd. All rights reserved.