Synthesis and characterization of fluorinated amorphous carbon films by reactive magnetron sputtering

被引：33

作者：

Ishihara, M

Suzuki, M

Watanabe, T

Nakamura, T

Tanaka, A

Koga, Y

机构：

[1] Natl Inst Adv Ind Sci & Technol, Res Ctr Adv Carbon Mat, Tsukuba, Ibaraki 3058565, Japan

[2] Mitsubishi Heavy Indt LTD, Kanazawa Ku, Yokohama, Kanagawa 2368515, Japan

来源：

关键词：

sputtering fluorine; diamond-like carbon; tribological property;

D O I：

10.1016/j.diamond.2004.12.019

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Fluorine incorporated amorphous carbon thin films were fabricated on a Si substrate with various values of CF4 flow ratio R (R=CF4/CH4) by RF magnetron sputtering of a graphite target. The fluorine content of the films increased from 0 at.% to 40 at.% and the hydrogen content decreased with increase of the CF4 flow ratio R. Below the fluorine content of 25 at.%, typical diamond-like films were prepared and the hardness of the films exceeded 8 GPa. On the other hand, for higher fluorine content, polymer-like films were prepared and the hardness of the films was 0.5 GPa. From a ball-on-disk reciprocating friction test with a stainless steel ball, the friction coefficient of the a-C:F films at a fluorine content of 25 at.% was low in dry air, humid air and water environments. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：989 / 993

页数：5

共 21 条

[1] Production and wetting properties of fluorinated diamond-like carbon coatings [J].