Mechanical properties of B-C-N films synthesized by an electron beam excited plasma-CVD method

被引：10

作者：

Hasegawa, T

Yamamoto, K

Kakudate, Y

Ban, M

机构：

[1] Japan Fine Ceram Ctr, FCT Project, FCT Lab, Tsukuba, Ibaraki 3058565, Japan

[2] Natl Inst Adv Ind Sci & Technol, Res Ctr Adv Carbon Mat, Tsukuba, Ibaraki 3058565, Japan

[3] Kawasaki Heavy Ind Co Ltd, Tech Inst, Noda, Chiba 2788585, Japan

来源：

SURFACE & COATINGS TECHNOLOGY | 2003年 / 169卷

关键词：

plasma-CVD; B-C-N films; hardness; friction coefficient; wear rate;

D O I：

10.1016/S0257-8972(03)00039-2

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We have synthesized B-C-N films by an electron beam excited plasma-CVD method and characterized structures and properties of the obtained films. In this paper, tribological properties of the films under dry-lubrication were investigated with a ball-on-disc type friction tester. The hardness of the films increases monotonically with increasing boron content and both the friction coefficient and the wear rate increase with increasing the hardness. From these results the low friction coefficient can be attributed to the formation of a sp(2)-bonded B-C-N structure. And it is suggested that the cause of the wear for the B-C-N films may be a microscopic peeling, because the film should become more brittle and the internal stress of the film should become larger for the harder film. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：270 / 273

页数：4

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