Cleaning of HT-7 Tokamak Exposed First Mirrors by Radio Frequency Magnetron Sputtering Plasma

被引:15
作者
Yan Rong [1 ]
Chen Junling [1 ]
Chen Longwei [1 ]
Ding Rui [1 ]
Zhu Dahuan [1 ]
机构
[1] Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Peoples R China
基金
中国国家自然科学基金;
关键词
radio frequency; plasma sputtering; first mirror; cleaning; DIAGNOSTIC MIRRORS; HL-2A; ITER;
D O I
10.1088/1009-0630/16/12/13
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The stainless steel (SS) first mirror pre-exposed in the deposition-dominated environment of the HT-7 tokamak was cleaned in the newly built radio frequency (RF) magnetron sputtering plasma device. The deposition layer on the FM surface formed during the exposure was successfully removed by argon plasma with a RF power of about 80 W and a gas pressure of 0.087 Pa for 30 min. The total reflectivity of the mirrors was recovered up to 90% in the wavelength range of 300-800 nm, while the diffuse reflectivity showed a little increase, which was attributed to the increase of surface roughness in sputtering, and residual contaminants. The FMs made from single crystal materials could help to achieve a desired recovery of specular reflectivity in the future.
引用
收藏
页码:1158 / 1162
页数:5
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