Plasma and laser processing of YZT materials for sensor applications

被引：0
作者：
Mitu, B. [1 ]
Somacescu, S. [2 ]
Filipescu, M. [1 ]
Osiceanu, P. [2 ]
Parvulescu, V. [2 ]
Dinescu, M. [1 ]
Dinescu, G. [1 ]
机构：
[1] Natl Inst Lasers Plasma & Radiat Phys, Bucharest 077125, Romania
[2] Inst Phys Chem, Bucharest, Romania
来源：
JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS | 2008年 / 10卷 / 08期
关键词：
ternary oxides ZrO2-Y2O3-TiO2; hydrothermal synthesis; pulsed laser deposition; RF assisted pulsed laser deposition; gas sensors;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Ternary oxides of zirconium, yttrium and titanium were obtained by hydrothermal method in powder form and respectively as thin films by pulsed laser deposition, under different concentrations of TiO2. The materials were investigated regarding their morphology, topography, chemical and structural characteristics. Electrical measurements were performed in order to asses their use in toxic gas sensors. A parametric range of experimental conditions corresponding to a maximum sensitivity to NOx toxic gas has been established for the thin films deposited by pulsed laser deposition.
引用
收藏
页码：2061 / 2067
页数：7
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