A piezoelectric microvalve with integrated sensors for cryogenic applications

This paper describes a normally open, self-encapsulated, gas valve that has embedded sensors for pressure and temperature monitoring. The valve has been validated at operating temperatures over 80-380 K, and at pressures up to 130 kPa. A perimeter augmentation scheme for the valve seat has been implemented to provide higher flow modulation. Two kinds of suspensions are described for the valve seat. In tests performed at room temperature, the flow was modulated from 980 mL/min. with the valve fully open (0 V), to 0 mL/min. with 60 V actuation, at an inlet pressure of 55 kPa. Cryogenic flow rate tests show similar modulation with flow from 166 mL/min. with the valve fully open, to 5.3 mL/min. with 120 V actuation voltage, at an inlet pressure of 70 kPa. The platinum RTD temperature sensor is independently tested from 40-450 K with sensitivity of 0.23%/K in its operational range of 150-450 K. The pressure sensor has sensitivity of 250 ppm/kPa at room temperature.