Patterning chemically of inorganic-organic hybrid films using modified metal alkoxide

被引：0
|
作者：
Yamada, N [1 ]
Yoshinaga, I [1 ]
Katayama, S [1 ]
机构：
[1] Nippon Steel Corp Ltd, Adv Technol Res Labs, Nakahara Ku, Kawasaki, Kanagawa 2110035, Japan
来源：
SOL-GEL SYNTHESIS AND PROCESSING | 1998年 / 95卷
关键词：
D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Optical properties and patterning of the inorganic-organic hybrid films prepared from diethoxydimethylsilane (DEDMS) and Ti(OC2H5)(4) modified with ethyl acetoacetate (EAcAc) were studied. The films showed the refractive index of 1.62-1.67 and small in-plane scattering. FT-IR study revealed that the chelate complex of Ti(OC2H5)(4) and EAcAc in the hybrid film were decomposed by UV-irradiation at 254 nm. The decomposition of the chelate complex brought about the structure change in the hybrids, leading to the solubility difference between UV-irradiated and unirradiated regions. This finding enabled us to pattern the hybrid films.
引用
收藏
页码：235 / 242
页数：8
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