Numerical simulation of temperature and flow field in the melt for the vapour-pressure-controlled Czochralski growth of GaAs

被引:0
|
作者
Miller, W [1 ]
Rehse, U [1 ]
机构
[1] Inst Kristallzuchtung, D-12489 Berlin, Germany
关键词
fluid flow; Czochralski growth; FIDAP (TM);
D O I
10.1002/1521-4079(200108)36:7<685::AID-CRAT685>3.0.CO;2-#
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The influence of the melt flow on the temperature field and interface during the vapour-pressure-controlled growth of GaAs was studied numerically with the commercial general-purpose program FIDAP (TM). The thermal boundary conditions for the domain of seed, crystal, boron oxide and crucible were taken from a global calculation for an equipment used at the IKZ to grow 6 " crystals. Due to the large melt volume the buoyancy forces become rather strong and have to be counteracted by reasonable rotation rates. Preliminary results have been obtained for iso- and counter-rotation showing that the flow field exhibits structures on small scales. Hi-h rotation rates are needed to counteract the buoyancy flow efficiently and to achieve a smooth flat interface. Even if the the flow structure is not resolved in detail, the interface shape can be deduced form the calculations.
引用
收藏
页码:685 / 694
页数:10
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