Micro light plates for low-power photoactivated (gas) sensors

被引:45
作者
Markiewicz, Nicolai [1 ,2 ]
Casals, Olga [1 ]
Fabrega, Cristian [1 ]
Gracia, Isabel [3 ]
Cane, Carles [3 ]
Wasisto, Hutomo Suryo [2 ,4 ]
Waag, Andreas [2 ,4 ]
Daniel Prades, Joan [1 ]
机构
[1] Univ Barcelona, Dept Elect & Biomed Engn, MIND IN2UB, E-08028 Barcelona, Spain
[2] Tech Univ Carolo Wilhelmina Braunschweig, IHT LENA, D-38106 Braunschweig, Germany
[3] IMB CNM CSIC, Inst Microelect Barcelona, Campus UAB, E-08193 Bellaterra, Spain
[4] Tech Univ Carolo Wilhelmina Braunschweig, Epitaxy Competence Ctr Ec2, D-38106 Braunschweig, Germany
基金
欧洲研究理事会;
关键词
OXIDE; NANOWIRES; NO2; PERFORMANCE; CONSUMPTION; RESPONSES; HUMIDITY;
D O I
10.1063/1.5078497
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report a miniaturized device integrating a photoactive material with a highly efficient Light Emitting Diode light source. This so-called micro light plate configuration allows for maximizing the irradiance impinging on the photoactive material, with a minimum power consumption, excellent uniformity, and accurate control of the illumination. We demonstrate these advantages with an example application: photoactivated gas sensors with a power consumption as low as 30 mu W (this is 1000 times lower than the best figures reported to date). The letter also presents a quantitative model and a set of design rules to implement it in further integrated applications. Published under license by AIP Publishing.
引用
收藏
页数:5
相关论文
共 40 条
[1]   Photoactivated Mixed In-Plane and Edge-Enriched p-Type MoS2 Flake-Based NO2 Sensor Working at Room Temperature [J].
Agrawal, Abhay V. ;
Kumar, Rahul ;
Venkatesan, Swaminathan ;
Zakhidov, Alex ;
Yang, Guang ;
Bao, Jiming ;
Kumar, Mahesh ;
Kumar, Mukesh .
ACS SENSORS, 2018, 3 (05) :998-1004
[2]  
[Anonymous], LABSPH TECH GUID RAD
[3]   Technological Journey Towards Reliable Microheater Development for MEMS Gas Sensors: A Review [J].
Bhattacharyya, P. .
IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2014, 14 (02) :589-599
[4]   SiC-based MIS gas sensor for high water vapor environments [J].
Casals, Olga ;
Becker, Thomas ;
Godignon, Philippe ;
Romano-Rodriguez, Albert .
SENSORS AND ACTUATORS B-CHEMICAL, 2012, 175 :60-66
[5]   Highly compressible fluorescent particles for pressure sensing in liquids [J].
Cellini, F. ;
Peterson, S. D. ;
Porfiri, M. .
APPLIED PHYSICS LETTERS, 2017, 110 (22)
[6]   UV light activation of tin oxide thin films for NO2 sensing at low temperatures [J].
Comini, E ;
Faglia, G ;
Sberveglieri, G .
SENSORS AND ACTUATORS B-CHEMICAL, 2001, 78 (1-3) :73-77
[7]   Light enhanced gas sensing properties of indium oxide and tin dioxide sensors [J].
Comini, E ;
Cristalli, A ;
Faglia, G ;
Sberveglieri, G .
SENSORS AND ACTUATORS B-CHEMICAL, 2000, 65 (1-3) :260-263
[8]   A model for the response towards oxidizing gases of photoactivated sensors based on individual SnO2 nanowires [J].
Daniel Prades, Joan ;
Jimenez-Diaz, Roman ;
Manzanares, Marta ;
Hernandez-Ramirez, Francisco ;
Cirera, Albert ;
Romano-Rodriguez, Albert ;
Mathur, Sanjay ;
Ramon Morante, Joan .
PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2009, 11 (46) :10881-10889
[9]   Development of ultra-low-power consumption MOX sensors with ppb-level VOC detection capabilities for emerging applications [J].
Elmi, I. ;
Zampolli, S. ;
Cozzani, E. ;
Mancarella, F. ;
Cardinali, G. C. .
SENSORS AND ACTUATORS B-CHEMICAL, 2008, 135 (01) :342-351
[10]   Facile Synthesis and UV-Activated Gas Sensing Performance of Ag: ZnO Nano-Ellipsoids [J].
Espid, Ehsan ;
Taghipour, Fariborz .
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2018, 7 (07) :Q3089-Q3093