Flexible Polyimide Micropump Fabricated Using Hot Embossing

被引：25

作者：

Komatsuzaki, Hiroki ^{[1
]}

Suzuki, Kenta ^{[1
]}

Liu, Yingwei ^{[1
]}

Kosugi, Tatsuya ^{[1
]}

Ikoma, Ryuta ^{[1
]}

Youn, Sung-Won ^{[2
]}

Takahashi, Masaharu ^{[2
]}

Maeda, Ryutaro ^{[2
]}

Nishioka, Yasushiro ^{[1
]}

机构：

[1] Nihon Univ, Dept Precis Machinery Engn, Coll Sci & Technol, Chiba 2748501, Japan

[2] Natl Inst Adv Ind Sci & Technol, Adv Mfg Res Inst, Tsukuba, Ibaraki 3058564, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2011年 / 50卷 / 06期

关键词：

DRUG-DELIVERY; MICROFLUIDIC CHANNELS; MECHANICAL-PROPERTIES; FLUID PUMP; FILMS; GLASS; FLOW; MICRONOZZLE/DIFFUSER; NANOIMPRINT; PROBES;

D O I：

10.1143/JJAP.50.06GM09

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Micropumps are important components of advanced microfluidic systems. Here, polyimide (PI) as an advantageous structural material for flexible micropumps was focused on. This is because PI has many advantageous properties such as high thermal stability and superior mechanical strength. However, the difficulty in realizing an all-PI micropump lies in fabricating microstructures on PI film surfaces. In this paper, we present a novel all-PI micropump fabricated using hot embossing. The micropump had diffuser/nozzle valves and functioned by vibrating a 2-mu m-thick PI diaphragm with alternating air pressures between 0 and 10 kPa at a frequency of 3 Hz. The height and diameter of the PI micropump chamber were 200 mu m and 5 mm, respectively. The flow rate of water in the micropump was 34 mu l/min. This micropump is suitable for flexible microfluidic systems. (c) 2011 The Japan Society of Applied Physics

引用

页数：6

共 37 条

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