Fabrication of fluidic chips with 1-D nanochannels on PMMA substrates by photoresist-free UV-lithography and UV-assisted low-temperature bonding

被引：13

作者：

Hu, Xianqiao ^{[1
]}

He, Qiaohong ^{[1
]}

Zhang, Xiangbo ^{[1
]}

Chen, Hengwu ^{[1
]}

机构：

[1] Zhejiang Univ, Inst Microanalyt Syst, Dept Chem, Hangzhou 310058, Zhejiang, Peoples R China

来源：

MICROFLUIDICS AND NANOFLUIDICS | 2011年 / 10卷 / 06期

基金：

中国国家自然科学基金;

关键词：

Fabrication of nano-fluidic chips; PMMA; Photoresist-free UV-lithography; UV-assisted low-temperature bonding; PLANAR NANOFLUIDIC CHANNELS; POLY(METHYL METHACRYLATE); DNA; PRECONCENTRATION; SEPARATION; RADIATION; SURFACES; DEVICE; GLASS;

D O I：

10.1007/s10404-010-0753-6

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A novel method for fabricating nano- or submicro-fluidic PMMA chips using photoresist-free UV-lithography and UV-assisted low-temperature bonding was developed. The nano- or submicro-channels were fabricated by exposing the PMMA substrate to the UV-light through a mask for a certain time. The PMMA substrate with channels and another flat PMMA cover sheet were pretreated with the UV-light for 2 h before they were brought together in running water. The bonding was carried out under a pressure of (1.19 +/- A 0.12) x 10(5) Pa and at a temperature of 45A degrees C for 35 min. The chips bonded in this way could bear a tensile of 6.71 +/- A 2.50 MPa, and the deformation of the bonded channel was about 13%. A hybrid micro- and nano-fluidic PMMA chip fabricated with the developed method was demonstrated for the test of the electrokinetically driven ion enrichment and ion depletion.

引用

页码：1223 / 1232

页数：10

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