Fabrication of fluidic chips with 1-D nanochannels on PMMA substrates by photoresist-free UV-lithography and UV-assisted low-temperature bonding

被引：13

作者：

Hu, Xianqiao ^{[1
]}

He, Qiaohong ^{[1
]}

Zhang, Xiangbo ^{[1
]}

Chen, Hengwu ^{[1
]}

机构：

[1] Zhejiang Univ, Inst Microanalyt Syst, Dept Chem, Hangzhou 310058, Zhejiang, Peoples R China

来源：

MICROFLUIDICS AND NANOFLUIDICS | 2011年 / 10卷 / 06期

基金：

中国国家自然科学基金;

关键词：

Fabrication of nano-fluidic chips; PMMA; Photoresist-free UV-lithography; UV-assisted low-temperature bonding; PLANAR NANOFLUIDIC CHANNELS; POLY(METHYL METHACRYLATE); DNA; PRECONCENTRATION; SEPARATION; RADIATION; SURFACES; DEVICE; GLASS;

D O I：

10.1007/s10404-010-0753-6

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A novel method for fabricating nano- or submicro-fluidic PMMA chips using photoresist-free UV-lithography and UV-assisted low-temperature bonding was developed. The nano- or submicro-channels were fabricated by exposing the PMMA substrate to the UV-light through a mask for a certain time. The PMMA substrate with channels and another flat PMMA cover sheet were pretreated with the UV-light for 2 h before they were brought together in running water. The bonding was carried out under a pressure of (1.19 +/- A 0.12) x 10(5) Pa and at a temperature of 45A degrees C for 35 min. The chips bonded in this way could bear a tensile of 6.71 +/- A 2.50 MPa, and the deformation of the bonded channel was about 13%. A hybrid micro- and nano-fluidic PMMA chip fabricated with the developed method was demonstrated for the test of the electrokinetically driven ion enrichment and ion depletion.

引用

页码：1223 / 1232

页数：10

共 45 条

[1] Nanofluidic devices and their applications [J].

Abgrall, Patirick ;

Nguyen, Nam Trung .

ANALYTICAL CHEMISTRY, 2008, 80 (07) :2326-2341

[2] Fabrication of planar nanofluidic channels in a thermoplastic by hot-embossing and thermal bonding [J].

Abgrall, Patrick ;

Low, Lee-Ngo ;

Nguyen, Nam-Trung .

LAB ON A CHIP, 2007, 7 (04) :520-522

[3] Entropic recoil separation of long DNA molecules [J].

Cabodi, M ;

Turner, SWP ;

Craighead, HG .

ANALYTICAL CHEMISTRY, 2002, 74 (20) :5169-5174

[4] Fabrication of single nanofluidic channels in poly(methylmethacrylate) films via focused-ion beam milling for use as molecular gates [J].

Cannon, DM ;

Flachsbart, BR ;

Shannon, MA ;

Sweedler, JV ;

Bohn, PW .

APPLIED PHYSICS LETTERS, 2004, 85 (07) :1241-1243

[5] Simple replication methods for producing nanoslits in thermoplastics and the transport dynamics of double-stranded DNA through these slits [J].

Chantiwas, Rattikan ;

Hupert, Mateusz L. ;

Pullagurla, Swathi R. ;

Balamurugan, Subramanian ;

Tamarit-Lopez, Jesus ;

Park, Sunggook ;

Datta, Proyag ;

Goettert, Jost ;

Cho, Yoon-Kyoung ;

Soper, Steven A. .

LAB ON A CHIP, 2010, 10 (23) :3255-3264

[6] Fabrication of high-aspect-ratio polymer nanochannels using a novel Si nanoimprint mold and solvent-assisted sealing [J].

Cho, Y. H. ;

Park, J. ;

Park, H. ;

Cheng, X. ;

Kim, B. J. ;

Han, A. .

MICROFLUIDICS AND NANOFLUIDICS, 2010, 9 (2-3) :163-170

[7] Chemistry in nanochannel confinement [J].

Gardeniers, Han J. G. E. .

ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 2009, 394 (02) :385-397

[8] New approaches to nanofabrication: Molding, printing, and other techniques [J].

Gates, BD ;

Xu, QB ;

Stewart, M ;

Ryan, D ;

Willson, CG ;

Whitesides, GM .

CHEMICAL REVIEWS, 2005, 105 (04) :1171-1196

[9] The evolution of dip-pen nanolithography [J].

Ginger, DS ;

Zhang, H ;

Mirkin, CA .

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 2004, 43 (01) :30-45

[10] Deep-UV patterning of commercial grade PMMA for low-cost, large-scale microfluidics [J].

Haiducu, M. ;

Rahbar, M. ;

Foulds, I. G. ;

Johnstone, R. W. ;

Sameoto, D. ;

Parameswaran, M. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (11)

← 1 2 3 4 5 →