共 23 条
[3]
BROWN SC, 1967, BASIC DATA PLASMA PH, P218
[4]
Chen F F, 1984, INTRO PLASMA PHYSICS, V1, P96
[5]
COBINE JD, 1958, GASEOUS CONDUCTORS, P207
[7]
FORRESTER AT, 1988, LARGE ION BEAMS, P10
[8]
HIGH-POWER MODULATOR FOR PLASMA ION-IMPLANTATION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1994, 12 (02)
:838-842
[10]
GOEBEL DM, 1993, P 19 IEEE PULS POW C, P384