Current status of AlInN layers lattice-matched to GaN for photonics and electronics

被引:316
作者
Butte, R. [1 ]
Carlin, J-F
Feltin, E.
Gonschorek, M.
Nicolay, S.
Christmann, G.
Simeonov, D.
Castiglia, A.
Dorsaz, J.
Buehlmann, H. J.
Christopoulos, S.
von Hoegersthal, G. Baldassarri Hoeger
Grundy, A. J. D.
Mosca, M.
Pinquier, C.
Py, M. A.
Demangeot, F.
Frandon, J.
Lagoudakis, P. G.
Baumberg, J. J.
Grandjean, N.
机构
[1] Ecole Polytech Fed Lausanne, IPEQ, CH-1015 Lausanne, Switzerland
[2] Univ Southampton, Sch Phys & Astron, Southampton SO17 1BJ, Hants, England
[3] Univ Toulouse 3, Phys Solides Lab, F-31062 Toulouse, France
[4] Univ Palermo, DIEET, Palermo, Italy
关键词
D O I
10.1088/0022-3727/40/20/S16
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the current properties of Al1-x InxN (x approximate to 0.18) layers lattice- matched ( LM) to GaN and their specific use to realize nearly strain- free structures for photonic and electronic applications. Following a literature survey of the general properties of AlInN layers, structural and optical properties of thin state- of- the- art AlInN layers LM to GaN are described showing that despite improved structural properties these layers are still characterized by a typical background donor concentration of ( 1 - 5) x 10(18) cm(-3) and a large Stokes shift (similar to 800 meV) between luminescence and absorption edge. The use of these AlInN layers LM to GaN is then exemplified through the properties of GaN/ AlInN multiple quantum wells ( QWs) suitable for near- infrared intersubband applications. A built- in electric field of 3.64MVcm(-1) solely due to spontaneous polarization is deduced from photoluminescence measurements carried out on strain- free single QW heterostructures, a value in good agreement with that deduced from theoretical calculation. Other potentialities regarding optoelectronics are demonstrated through the successful realization of crack- free highly reflective AlInN/ GaN distributed Bragg reflectors ( R > 99%) and high quality factor microcavities ( Q > 2800) likely to be of high interest for short wavelength vertical light emitting devices and fundamental studies on the strong coupling regime between excitons and cavity photons. In this respect, room temperature ( RT) lasing of a LM AlInN/ GaN vertical cavity surface emitting laser under optical pumping is reported. A description of the selective lateral oxidation of AlInN layers for current confinement in nitride- based light emitting devices and the selective chemical etching of oxidized AlInN layers is also given. Finally, the characterization of LM AlInN/ GaN heterojunctions will reveal the potential of such a system for the fabrication of high electron mobility transistors through the report of a high two- dimensional electron gas sheet carrier density ( n(s) similar to 2.6 x 10(13) cm(-2)) combined with a RT mobility mu(e) similar to 1170 cm(2) V-1 s(-1) and a low sheet resistance, R similar to 210 Omega square.
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收藏
页码:6328 / 6344
页数:17
相关论文
共 93 条
  • [1] GROWTH OF INXGA1-XN AND INXAL1-XN ON GAAS METALORGANIC MOLECULAR-BEAM EPITAXY
    ABERNATHY, CR
    MACKENZIE, JD
    BHARATAN, SR
    JONES, KS
    PEARTON, SJ
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03): : 716 - 718
  • [2] Pyroelectric properties of Al(In)GaN/GaN hetero- and quantum well structures
    Ambacher, O
    Majewski, J
    Miskys, C
    Link, A
    Hermann, M
    Eickhoff, M
    Stutzmann, M
    Bernardini, F
    Fiorentini, V
    Tilak, V
    Schaff, B
    Eastman, LF
    [J]. JOURNAL OF PHYSICS-CONDENSED MATTER, 2002, 14 (13) : 3399 - 3434
  • [3] Bernardini F, 1999, PHYS STATUS SOLIDI B, V216, P391, DOI 10.1002/(SICI)1521-3951(199911)216:1<391::AID-PSSB391>3.0.CO
  • [4] 2-K
  • [5] Spontaneous polarization and piezoelectric constants of III-V nitrides
    Bernardini, F
    Fiorentini, V
    Vanderbilt, D
    [J]. PHYSICAL REVIEW B, 1997, 56 (16): : 10024 - 10027
  • [6] Accurate calculation of polarization-related quantities in semiconductors
    Bernardini, F
    Fiorentini, V
    Vanderbilt, D
    [J]. PHYSICAL REVIEW B, 2001, 63 (19):
  • [7] Optical constants of epitaxial AlGaN films and their temperature dependence
    Brunner, D
    Angerer, H
    Bustarret, E
    Freudenberg, F
    Hopler, R
    Dimitrov, R
    Ambacher, O
    Stutzmann, M
    [J]. JOURNAL OF APPLIED PHYSICS, 1997, 82 (10) : 5090 - 5096
  • [8] Room-temperature polariton luminescence from a bulk GaN microcavity -: art. no. 033315
    Butté, R
    Christmann, G
    Feltin, E
    Carlin, JF
    Mosca, M
    Ilegems, M
    Grandjean, N
    [J]. PHYSICAL REVIEW B, 2006, 73 (03):
  • [9] Recent progress in the growth of highly reflective nitride-based distributed Bragg reflectors and their use in microcavities
    Butté, R
    Feltin, E
    Dorsaz, J
    Christmann, G
    Carlin, JF
    Grandjean, N
    Ilegems, M
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (10): : 7207 - 7216
  • [10] BUTTE R, IN PRESS POLARIZATIO