Deposition of thin ferromagnetic films for application in magnetic sensor microsystems

A number of soft ferromagnetic compositions have been used to fabricate thin-film cores for magnetic sensor microsystems. Techniques based on magnetron sputtering and laser ablation deposition have been extensively explored. The properties of the films have been found to depend strongly on a particular deposition regime and the type of material and. weakly, on an a priori difference between the laser- and magnetron-assisted methods. As-deposited films demonstrate relatively low coercivity H-c similar to (0.1-1) Oe and composition-dependent low (H-k < 5 Oe) or high (H-k similar to 20 Oe) in-plane anisotropy, which is governed by the magnetic conditions of the deposition. Both types of films are promising for application in different types of sensors. (C) 1998 Elsevier Science S.A. All rights reserved.