A compact semi-lumped coplanar waveguide low-pass filter fabricated on high resistivity silicon substrate

In this letter, the fabrication of a compact and high performance semi-lumped coplanar waveguide low-pass filter (CPW-LPF) on high resistivity silicon (HRS) substrate at millimeter wave is proposed. The design procedure and the equivalent circuit of the proposed semi-lumped CPW-LPF is discussed. The filter structure of is very simple but its performances is fairly good. This designed filter at cutoff frequency f(c) of 31 GHz has very good measured characteristics including the low insertion loss, sharp rejection and low group delay, due to the reduced substrate loss of HRS. Experimental results of the fabricated filter show a good agreement with the predicted results.