A compact semi-lumped coplanar waveguide low-pass filter fabricated on high resistivity silicon substrate

被引：2

作者：

Hung, Cheng-Yuan ^{[1
]}

Yang, Ru-Yuan

Weng, Min-Hang

Su, Yan-Kuin

机构：

[1] Natl Cheng Kung Univ, Dept Elect Engn, Inst Microelect, Adv Optoelect Technol Ctr, Tainan 70101, Taiwan

[2] Natl Nano Device Labs, Hsinchu, Taiwan

来源：

IEICE TRANSACTIONS ON ELECTRONICS | 2007年 / E90C卷 / 09期

关键词：

coplanar waveguide; low-pass filter high resistivity silicon; cutoff frequency; group delay; SI;

D O I：

10.1093/ietele/e90-c.9.1837

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this letter, the fabrication of a compact and high performance semi-lumped coplanar waveguide low-pass filter (CPW-LPF) on high resistivity silicon (HRS) substrate at millimeter wave is proposed. The design procedure and the equivalent circuit of the proposed semi-lumped CPW-LPF is discussed. The filter structure of is very simple but its performances is fairly good. This designed filter at cutoff frequency f(c) of 31 GHz has very good measured characteristics including the low insertion loss, sharp rejection and low group delay, due to the reduced substrate loss of HRS. Experimental results of the fabricated filter show a good agreement with the predicted results.

引用

页码：1837 / 1840

页数：4