Efficient and Optimal Scheduling of Time-constrained Hybrid Multi-cluster Tools in Semiconductor Industry

被引：0

作者：

Yang, FaJun ^{[1
]}

Wu, NaiQi ^{[1
]}

Qiao, Yan ^{[1
]}

Zhou, MengChu ^{[2
]}

机构：

[1] Guangdong Univ Technol, Sch Electromech Engn, Dept Ind Engn, Guangzhou 510006, Guangdong, Peoples R China

[2] New Jersey Inst Technol, Dept Elect & Comp Engn, Newark, NJ 07102 USA

来源：

2016 IEEE 13TH INTERNATIONAL CONFERENCE ON NETWORKING, SENSING, AND CONTROL (ICNSC) | 2016年

关键词：

MANUFACTURING SYSTEMS; PERFORMANCE;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Scheduling a multi-cluster tool with wafer residency time constraints is highly challenging yet important in ensuring high productivity of wafer fabrication. This paper presents a method to find an optimal one-wafer cyclic schedule for it. A Petri net is developed to model its dynamic behavior. By using this model, its schedule is found and analytically expressed as a function of robots' waiting time. In addition, this work establishes the necessary and sufficient conditions under which a feasible one-wafer cyclic schedule exists. Then, it gives efficient algorithms to find such a schedule that is optimal. These algorithms require one to determine the robots' waiting time via simple calculation and thus are efficient.

引用

页数：6