Improvement in measurement accuracy of on-wafer measurements from millimeter-wave to Terahertz frequencies

被引：1
|
作者：
Sakamaki, Ryo [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Res Inst Phys Measurement, Tsukuba, Ibaraki, Japan
来源：
2021 IEEE CPMT SYMPOSIUM JAPAN (ICSJ) | 2021年
关键词：
on-wafer measurement; millimeter-wave; measurement technology; uncertainty; probe;
D O I：
10.1109/ICSJ52620.2021.9648872
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Device measurement techniques in the millimeter-wave (mmW) and THz frequencies are necessary for realizing novel communication technologies such as beyond-5G/6G technologies. Degraded measurement reproducibility is one of the serious problems in those frequencies band. Precision measurement technique, named RF signal detection (RSD) technique, is developed to address the problem. This paper reviews the RSD technique, and reports recent improvements, such as demonstration in the frequencies up to 500 GHz, and with a multi-signal probe.
引用
收藏
页码：168 / 171
页数：4
相关论文
共 50 条
  • [1] On-wafer measurement at millimeter wave frequencies
    Williams, DF
    Belquin, JM
    Dambrine, G
    Fenton, R
    1996 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 1996, : 1683 - 1686
  • [2] An Intra-laboratory Investigation of On-wafer Measurement Reproducibility at Millimeter-wave Frequencies
    Clarke, R. G.
    Li, C.
    Ridler, N. M.
    2017 90TH ARFTG MICROWAVE MEASUREMENT SYMPOSIUM (ARFTG), 2017,
  • [3] A Technique for Optimal On-Wafer Device Spacing at Millimeter-Wave Frequencies
    Jones, Rob D.
    Cheron, Jerome
    Diener, Joseph E.
    Aaen, Peter H.
    Chamberlin, Richard A.
    Jamroz, Benjamin F.
    Williams, Dylan F.
    Feldman, Ari D.
    Elsherbeni, Atef Z.
    IEEE MICROWAVE AND WIRELESS TECHNOLOGY LETTERS, 2025, 35 (03): : 370 - 373
  • [4] A "Calibration on the Fly" Method for Millimeter-wave On-wafer Measurement
    Li, Chong
    Liu, Chen
    Wu, Aihua
    Liang, Faguo
    Wang, Yibang
    Luan, Peng
    2020 13TH UK-EUROPE-CHINA WORKSHOP ON MILLIMETRE-WAVES AND TERAHERTZ TECHNOLOGIES (UCMMT2020), 2020,
  • [5] Performance Evaluations of Dielectric Waveguide for Millimeter-wave On-Wafer Measurements
    Horibe, Masahiro
    Sakamaki, Ryo
    Kato, Yuto
    88TH ARFTG MICROWAVE MEASUREMENT CONFERENCE - POWER AMPLIFIERS AND SYSTEMS DESIGN FOR WIRELESS APPLICATION, 2016,
  • [6] Considerations for On-Wafer Millimeter-Wave Measurements on Thin Ceramic Substrate
    Hammou, Djilali
    Djerafi, Tarek
    Nedil, Mourad
    Tatu, Serioja Ovidiu
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2016, 65 (02) : 441 - 447
  • [7] Development of Verification Process for On-Wafer Measurement at Millimeter-Wave Frequency
    Sakamaki, Ryo
    Horibe, Masahiro
    2016 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS (CPEM 2016), 2016,
  • [8] On-Wafer Noise Figure Measurements of Millimeter-Wave LNA and Mixer
    Chang, Yin-Cheng
    Lin, Shuw-Guann
    Chiou, Hwann-Kaeo
    Chang, Da-Chiang
    Juang, Ying-Zong
    2010 ASIA-PACIFIC MICROWAVE CONFERENCE, 2010, : 1424 - 1427
  • [9] An enhanced on-wafer millimeter-wave noise parameter measurement system
    Béland, P
    Roy, L
    Labonté, S
    Stubbs, M
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1999, 48 (04) : 825 - 829
  • [10] Pure-mode network analyzer concept for on-wafer measurements of differential circuits at millimeter-wave frequencies
    Zwick, T
    Pfeiffer, UR
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2005, 53 (03) : 934 - 937
12345