Self consistent modeling of surface wave sustained discharges

Selfconsistent kinetic modeling of surface wave sustained discharges is presented for argon plasmas with particular attention to problems posed by radical and axial nonuniformity. Numerical results are discussed with view to the selfconsistency elctric field strength and electron density, the importance of collisionless heating is pointed out, as well as the expected marginal influence of ponderomotive effects. Comparisions to some experimental data available are given. The need for future improvements of the nonlocal approach used is stressed.