Snap-through buckling of initially curved microbeam subject to an electrostatic force

被引:31
作者
Chen, X. [1 ]
Meguid, S. A. [1 ]
机构
[1] Univ Toronto, Dept Mech & Ind Engn, Mech & Aerosp Design Lab, 5 Kings Coll Rd, Toronto, ON M5S 3G8, Canada
来源
PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 2015年 / 471卷 / 2177期
基金
加拿大自然科学与工程研究理事会;
关键词
bistable microelectromechanical systems; initially curved microbeam; snap-through criterion; electrostatic force; size effect; fringing field effect; STRAIN GRADIENT ELASTICITY; COUPLE STRESS THEORY; PULL-IN BEHAVIOR; SYMMETRY-BREAKING; BEAM; MICROSTRUCTURE; MODEL; INSTABILITIES; ACTUATORS; ARCH;
D O I
10.1098/rspa.2015.0072
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
In this paper, the snap-through buckling of an initially curved microbeam subject to an electrostatic force, accounting for fringing field effect, is investigated. The general governing equations of the curved microbeam are developed using Euler-Bernoulli beam theory and used to develop a new criterion for the snap-through buckling of that beam. The size effect of the microbeam is accounted for using the modified couple stress theory, and intermolecular effects, such as van der Waals and Casimir forces, are also included in our snap-through formulations. The snap-through governing equations are solved using Galerkin decomposition of the deflection. The results of our work enable us to carefully characterize the snap-through behaviour of the initially curved microbeam. They further reveal the significant effect of the beam size, and to a much lesser extent, the effect of fringing field and intermolecular forces, upon the snap-through criterion for the curved beam.
引用
收藏
页数:19
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