Snap-through buckling of initially curved microbeam subject to an electrostatic force

被引:31
作者
Chen, X. [1 ]
Meguid, S. A. [1 ]
机构
[1] Univ Toronto, Dept Mech & Ind Engn, Mech & Aerosp Design Lab, 5 Kings Coll Rd, Toronto, ON M5S 3G8, Canada
来源
PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 2015年 / 471卷 / 2177期
基金
加拿大自然科学与工程研究理事会;
关键词
bistable microelectromechanical systems; initially curved microbeam; snap-through criterion; electrostatic force; size effect; fringing field effect; STRAIN GRADIENT ELASTICITY; COUPLE STRESS THEORY; PULL-IN BEHAVIOR; SYMMETRY-BREAKING; BEAM; MICROSTRUCTURE; MODEL; INSTABILITIES; ACTUATORS; ARCH;
D O I
10.1098/rspa.2015.0072
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
In this paper, the snap-through buckling of an initially curved microbeam subject to an electrostatic force, accounting for fringing field effect, is investigated. The general governing equations of the curved microbeam are developed using Euler-Bernoulli beam theory and used to develop a new criterion for the snap-through buckling of that beam. The size effect of the microbeam is accounted for using the modified couple stress theory, and intermolecular effects, such as van der Waals and Casimir forces, are also included in our snap-through formulations. The snap-through governing equations are solved using Galerkin decomposition of the deflection. The results of our work enable us to carefully characterize the snap-through behaviour of the initially curved microbeam. They further reveal the significant effect of the beam size, and to a much lesser extent, the effect of fringing field and intermolecular forces, upon the snap-through criterion for the curved beam.
引用
收藏
页数:19
相关论文
共 47 条
[1]   Shear deformation beam models for functionally graded microbeams with new shear correction factors [J].
Akgoz, Bekir ;
Civalek, Omer .
COMPOSITE STRUCTURES, 2014, 112 :214-225
[2]   Modeling and analysis of micro-sized plates resting on elastic medium using the modified couple stress theory [J].
Akgoz, Bekir ;
Civalek, Omer .
MECCANICA, 2013, 48 (04) :863-873
[3]   FEM modelling and experimental characterization of microbeams in presence of residual stress [J].
Ballestra, Alberto ;
Brusa, Eugenio ;
De Pasquale, Giorgio ;
Munteanu, Mircea Gh. ;
Soma, Aurelio .
ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING, 2010, 63 (03) :477-488
[4]   Review of modeling electrostatically actuated microelectromechanical systems [J].
Batra, R. C. ;
Porfiri, M. ;
Spinello, D. .
SMART MATERIALS AND STRUCTURES, 2007, 16 (06) :R23-R31
[5]   Electromechanical model of electrically actuated narrow microbeams [J].
Batra, Romesh C. ;
Porfiri, Maurizio ;
Spinello, Davide .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (05) :1175-1189
[6]   Modeling and Analysis of an Electrically Actuated Microbeam Based on Nonclassical Beam Theory [J].
Belardinelli, Pierpaolo ;
Lenci, Stefano ;
Brocchini, Maurizio .
JOURNAL OF COMPUTATIONAL AND NONLINEAR DYNAMICS, 2014, 9 (03)
[7]  
Casimir H. B. G., 1948, Proc. Kon. Ned. Akad. Wet., V10, P261, DOI DOI 10.4236/WJNSE.2015.52007
[8]   Symmetry breaking, snap-through and pull-in instabilities under dynamic loading of microelectromechanical shallow arches [J].
Das, K. ;
Batra, R. C. .
SMART MATERIALS AND STRUCTURES, 2009, 18 (11)
[9]   Pull-in and snap-through instabilities in transient deformations of microelectromechanical systems [J].
Das, K. ;
Batra, R. C. .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (03)
[10]   Calculation of pull-in voltages for carbon-nanotube-based nanoelectromechanical switches [J].
Dequesnes, M ;
Rotkin, SV ;
Aluru, NR .
NANOTECHNOLOGY, 2002, 13 (01) :120-131