Thickness-dependent microstructures and electrical properties of CaCu3Ti4O12 films derived from sol-gel process

被引：26

作者：

Chang, Li-Chun

Lee, Dai-Ying ^{[1
]}

Ho, Chia-Cheng ^{[1
]}

Chiou, Bi-Shiou ^{[1
,2
]}

机构：

[1] Natl Chiao Tung Univ, Inst Elect, Hsinchu 30039, Taiwan

[2] Natl Chiao Tung Univ, Innovat Packaging Res Ctr, Hsinchu, Taiwan

来源：

THIN SOLID FILMS | 2007年 / 516卷 / 2-4期

关键词：

sol-gel; CaCu3Ti4O12 (CCTO); thickness-dependent properties; dielectric;

D O I：

10.1016/j.tsf.2007.07.009

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

CaCu3Ti4O12 (CCTO) thin films with various thicknesses were prepared by a sol-gel multiple coating processes on Pt/Ti/SiO2/Si substrates. Microstructures and surface morphologies of CCTO thin films were analyzed by grazing incident X-ray diffractometer (GIXRD) and scanning electron microscope (SEM), respectively. The correlation between the thickness and electrical properties of CCTO films was investigated. The dielectric constants of CCTO films decreased with increasing film thickness (coating cycle). Both the dielectric constant of CCTO films and interlayer are calculated. Possible mechanisms are explored to explain the thickness dependence of the dielectric constant of CCTO films. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：454 / 459

页数：6

共 14 条

[1] Microstructure and dielectric properties of pulsed-laser-deposited CaCu3Ti4O12 thin films on LaNiO3 buffered Pt/Ti/SiO2/Si substrates [J].