Fluorination of carbon nanotubes in CF4 plasma

The effect of CF4 gaseous plasma exposure to single-wall carbon nanotubes (CNTs) has been studied. Raman spectroscopy results show that CNTs have gained more disordered sp(3) bonds associated with functionalization, as both the flow rates of gas in the plasma and exposure time in the plasma are increased. Scanning electron microscopy images indicate the CNTs have been preserved after CF4 plasma exposure. X-ray photoelectron spectroscopy provides evidence of carbon to fluorine bonds (C-F) on the CNTs samples after CF4 plasma exposure. Semi-ionic and covalent C-F bonds are prevalent on the CNTs after CF4 exposure with the intensity ratio of the semi-ionic to covalent C-F bond decreasing as the flow rate of CF4 and exposure time in the CF4 plasma is increased. (C) 2003 American Institute of Physics.