Strain dynamics during La2O3/Lu2O3 superlattice and alloy formation

被引：2

作者：

Proessdorf, Andre ^{[1
]}

Niehle, Michael ^{[1
]}

Grosse, Frank ^{[1
]}

Rodenbach, Peter ^{[1
]}

Hanke, Michael ^{[1
]}

Trampert, Achim ^{[1
]}

机构：

[1] Paul Drude Inst Festkorperelekt, Hausvogteipl 5-7, D-10117 Berlin, Germany

来源：

JOURNAL OF APPLIED PHYSICS | 2016年 / 119卷 / 21期

关键词：

X-RAY; SURFACE; STABILITY; OXIDES;

D O I：

10.1063/1.4950875

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The dynamics of strain relaxation and intermixing during molecular beam epitaxy of La2O3 and Lu2O3 superlattices and alloys consisting of both binaries on Si(111) have been studied by real-time in situ grazing incidence x-ray diffraction and high resolution transmission electron microscopy. The presence of both hexagonal and cubic polymorphs of La2O3 influences the epitaxial formation within the superlattice. The process of strain relaxation is closely related to the presence of a (La,Lu)(2)O-3 alloy adopting a cubic symmetry. It is formed by interdiffusion of La and Lu atoms reducing internal lattice mismatch within the superlattice. An interface thickness dominated by interdiffusion regions of about 3 monolayers is determined by high-angle annular dark field scanning transmission electron microscopy. Published by AIP Publishing.

引用

页数：5

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