Mode ordering of single-drive multi-axis MEMS gyroscope for reduced cross-axis sensitivity

In this letter, a design technique is presented to reduce the cross-axis sensitivity (CAS) in single-drive multi axis microelectromechanical systems (MEMS) gyroscope. A design technique based on resonant mode ordering concerning drive-displacement amplitudes ratio and frequency differences ratio was proposed. A simplified single-drive multi-axis MEMS gyroscope, based on the mode-split approach, was analyzed for cross-axis sensitivity. The designed gyroscope utilizing a driving scheme based on a simple folded coupling spring has equal x and y - axes drive-displacement amplitudes of 3.892 mu m respectively. The proposed resonant mode ordering technique was used, and an equal sense-frequency difference of 184 Hz was achieved with respect to drive-mode frequency. The designed gyroscope having common resonant mode order was analyzed, and CAS of x and y - axes was computed to be 0.241% and 0.387% respectively. The proposed resonant mode order technique successfully reduced the cross-axis sensitivity in the designed gyroscope. The reduced cross-axis sensitivities of x and y - axes were 0.025% and 0.076% respectively. Comparison of both designs showed a reduced rate of 89.627% and 80.362% in x and y - axes respectively. The main sensitivities of x and y - axes were computed to be 0.055 nm/dps respectively. Furthermore, the significance of the proposed technique was experimentally verified. (c) 2021 Elsevier B.V. All rights reserved.