共 28 条
[15]
Tilted ion implantation as a cost-efficient sublithographic patterning technique
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2016, 34 (04)
[16]
Knoch J., 2005, IEEE Conference Proceedings of Device Research Conference (DRC), P153
[17]
Koswatta S.O, 2005, P IEDM, DOI 10.1109/iedm.2005.1609396
[18]
Lin X, 2001, IEEE P INT SO1 C, DOI [10.1109/SOIC.2001.958001, DOI 10.1109/SOIC.2001.958001]
[19]
Moselund KE, 2016, PROC EUR S-STATE DEV, P403, DOI 10.1109/ESSDERC.2016.7599671