Measurement of the influence of dispersion on white-light interferometry

被引：62
作者：
Pavlicek, P
Soubusta, J
机构：
[1] Palacky Univ, Joint Lab Opt, CZ-77207 Olomouc, Czech Republic
[2] Acad Sci Czech Republic, Inst Phys, CZ-77207 Olomouc, Czech Republic
来源：
APPLIED OPTICS | 2004年 / 43卷 / 04期
关键词：
D O I：
10.1364/AO.43.000766
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
White-light interferometry is a well-established method for measuring the height profiles of samples with rough as well as with smooth surfaces. Because white-light interferometry uses broadband light sources, the problem of dispersion arises. Because the optical paths in the two interferometer arms cannot be balanced for all wavelengths, the white-light correlogram is distorted, which interferes with its evaluation. We investigate the influence of setup parameters on the shape of the correlogram. Calculated values are compared with experimental results. (C) 2004 Optical Society of America.
引用
收藏
页码：766 / 770
页数：5
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