Experimental and theoretical investigation of nano-crystal and nitride-trap memory devices

被引:129
作者
De Salvo, B [1 ]
Ghibaudo, G
Pananakakis, G
Masson, P
Baron, T
Buffet, N
Fernandes, A
Guillaumot, B
机构
[1] CEA, LETI, F-38054 Grenoble 9, France
[2] ENSERG, LPCS, F-38016 Grenoble, France
[3] Inst Natl Sci Appl, LPM, F-69621 Villeurbanne, France
[4] ST Microelect, F-38019 Grenoble, France
关键词
memory; MOS device; nano-crystal; nitride;
D O I
10.1109/16.936709
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we propose a thorough experimental and theoretical investigation of memory-cell structures employing discrete-trap type storage nodes, using either natural nitride traps or semiconductor nano-crystals, thus operating with a small finite number of electrons, A detailed account of static and dynamic charging/discharging phenomena occurring in these devices is given, based on bias-, time-, and temperature-dependent measurements. A comprehensive interpretation of experimental results is proposed by means of a physical modeling, In particular, two different models are proposed. The first one consists in a modified floating-gate-like approach, while the second one is a trap-like approach, relying on the Shockley-Read-Hall statistics, Using these two approaches, some general behavior laws for memory operation are formulated. Considerations on the suitability of each model on the particular structures are suggested.
引用
收藏
页码:1789 / 1799
页数:11
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