Investigation of structure, adhesion strength, wear performance and corrosion behavior of platinum/ruthenium/nitrogen doped diamond-like carbon thin films with respect to film thickness

被引：27

作者：

Khun, N. W. ^{[1
]}

Liu, E. ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2011年 / 126卷 / 1-2期

关键词：

DLC thin film; Pt/Ru/N doping; DC magnetron sputtering; Film thickness; Wear; Corrosion; NaCl electrolyte; CATHODIC VACUUM-ARC; AMORPHOUS-CARBON; VOLTAMMETRIC BEHAVIOR; HEAVY-METALS; DLC FILMS; COATINGS; NITRIDE; ELECTRODES; PROTECTION; RESISTANCE;

D O I：

10.1016/j.matchemphys.2010.11.036

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, the corrosion performance of platinum/ruthenium/nitrogen doped diamond-like carbon (PtRuN-DLC) thin films deposited on p-Si substrates using a DC magnetron sputtering deposition system in a 0.1 M NaCl solution was investigated using potentiodynamic polarization test in terms of film thickness. The effect of the film thickness on the chemical composition, bonding structure, surface morphology, adhesion strength and wear resistance of the PtRuN-DLC films was studied using X-ray photoelectron spectroscopy (XPS), micro-Raman spectroscopy, atomic force microscopy (AFM), micro-scratch test and ball-on-disc tribotest, respectively. It was found that the wear resistance of the PtRuN-DLC films apparently increased with increased film thickness though the adhesion strength of the films decreased. The corrosion results revealed that the increased concentration of sp(2) bonds in the PtRuN-DLC films with increased film thickness shifted the corrosion potentials of the films to more negative values but the decreased porosity density in the films significantly decreased the corrosion currents of the films. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：220 / 226

页数：7

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