Evaluation of Alarm System Performance and Management in Semiconductor Manufacturing

Industrial alarm system management and enhancement have recently become a subject of high interest in the industrial domain as well as in the scientific research area. Alarm system performance is the key point to look at for the examination of whether they work correctly. Few research papers so far have focused on the semiconductor manufacturing process area. This paper summarizes some interesting work applied not long ago in other industries and especially those adapted to semiconductor manufacturing. It represents a concise description of semiconductor manufacturing processes, toward an understanding of the problems and challenges encountered. Furthermore, a basic statistical analysis employed to show some of alarm system performance metrics that have used, as shown in some well-known standards, to assess an alarm system performance as well as highlighting misconfigured alarms based on their recorded histories.