Amorphous lithium cobalt and nickel oxides thin films: preparation and characterization by RBS and PIGE

被引：25
|
作者：
Benqlilou-Moudden, H
Blondiaux, G
Vinatier, P
Levasseur, A
机构：
[1] CNRS, Inst Chim Mat Condensee Bordeaux, F-33402 Talence, France
[2] Ecole Natl Super Chim & Phys Bordeaux, F-33402 Talence, France
[3] CNRS, Ctr Etud & Rech Irradiat, F-45071 Orleans, France
来源：
THIN SOLID FILMS | 1998年 / 333卷 / 1-2期
关键词：
amorphous materials; cathodes; Rutherford backscattering spectroscopy; sputtering;
D O I：
10.1016/S0040-6090(98)00572-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin films have been deposited by radio-frequency magnetron sputtering, using LiCoO2, LiNiO2 and LiNi0.7Co0.3O2 targets, in argon or Ar/O-2 gas mixture. The composition of the thin films has been determined by proton induced gamma-ray emission (PIGE) analysis and by Rutherford backscattering spectroscopy (RBS). The oxygen partial pressure in the plasma influences the composition of the thin films; these results an discussed with regard to the film morphology. (C) 1998 Elsevier Science S.A. Ail lights reserved.
引用
收藏
页码：16 / 19
页数：4
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